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Pressure Regulator Valve (Precision Regulator for Low Pressure Regulation)
MODEL 6610
This valve has been developed for better repeatability and quick, reliable pressure regulation by increasing the accuracy of the low-pressure side compared with the Model 6600. It is ideal for high-sensitivity analyzers and semiconductor manufacturing equipment, as well as for research and development.
Features
-High-precision regulation on the low-pressure side
High regulation performance with repeatability of ±1% or less when
the pressure on the primary side and load resistance on the second-
ary side change under the set pressure condition of 0.01–0.15 MPa.
- Non-grease specification
The sections in contact with gas are made of stainless steel, Viton,
and Teflon without using grease. This valve is ideal for the semicon-
ductor industry which requires ultra-clean conditions.
- Lock nut
The regulating position, once it has been set, can be fixed by a lock
nut to prevent the setting from changing.
- Non-bleed type
This non-bleed type valve prevents gas from leaking to the outside
Applications
-Gas chromatography
- High-purity gas control
- Low-pressure controllers
- Semiconductor industry
Standard Specifications
- Fluids : Various gases
- Maximum primary pressure : 0.4MPa
- Secondary control pressure : 0.01-0.15MPa
- Maximum flow : 5L/MIN
- Minimum operating differential : 0.1 MPa or more
- Materials of parts in contact with gases : SUS316, FKM, fluorocarbon resin, SUS304,SUS303
- Proof pressure : 0.8MPa
- Repeatability : Within ±1% of the pressure rating
- Heat resistance : 5°C-60°C
- Connection end : Rc1/8
- Materials of parts in contact with fluids : SUS316, FKM, fluorocarbon resin, SUS304, SUS303
