Perusahaan ini terdaftar sebagai Free Member. Hindari melakukan pembayaran sebelum bertemu penjual atau melihat barang secara langsung. COD (Cash On Delivery) atau bertemu langsung dengan penjual merupakan metode transaksi aman yang kami sarankan.
Sensor type | Thermal sensor | ||||
Valve type | Normally closed proportional solenoid valve | ||||
Applicable gases*1 | N2, Air, H2, He, Ar, O2, CO2, etc. (Gases not specifically mentioned here are subject to calibration for N2 equivalent.) |
Air,N2 | |||
Flow range*2 | 10 SCCM to 10 SLM | 20 to 50 SLM (20 to 30 SLM for CO2) |
100, 150 SLM | 200, 300 SLM | |
Control range | 2 to 100% (F.S.) | 5 to 100% (F.S.) | |||
Response*3 | Total flow rate control range ≤ 1 sec (within ±2% F.S.) | ≤ 1.5 sec / ≤ 3 sec less than 10% (within ±2% F.S.) |
≤ 2 sec (within ±2% F.S.) | ||
Accuracy*4 | ±1.0% F.S. | ±2.0% F.S | |||
Repeatability | ±0.25%F.S. | ±0.5%F.S. | |||
Operating differential pressure*5 |
50 to 300 kPa (100 to 300 kPa for Ar and CO2) |
100 to 300 kPa (150 to 300 kPa for Ar and CO2) |
150 to 350 kPa | 200 SLM : 200 to 350 kPa 300 SLM : 250 to 350 kPa |
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Inlet maximum pressure | 500kPa(G) | ||||
Proof pressure | 980kPa(G) | ||||
External leak rate | ≤1.0 x 10-8 Pa·m3/sec (He) | ≤1.0 x 10-7 Pa·m3/sec (He) | |||
Temperature | Working temp. | 5 to 50℃ | |||
Accuracy guaranteed temp. |
15 to 35℃ | ||||
Allowable storage temp. |
-10 to 60℃ | ||||
Allowable operating humidity | 10 to 90% RH (without dew condensation) | ||||
Materials of gas contact part | SUS316, SUS316L, magnetic stainless steel, Ni, PTFE, PCTFE, and FKM | ||||
Electrical connection | D-sub 9-pin, KFC standard (SEMI standard compliant), RJ-45 modular jacks (two) | D-sub 9-pin , HR-10A (two) |
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Flow rate setting signal | 0 to 5 V DC (input impedance: approx. 1 MΩ) | ||||
Flow rate output signal | 0 to 5 V DC (load resistance 10 kΩ) | ||||
Digital communication | Address setting with RS485 rotary switch : up to 99 devices (9600 bps) | ||||
Required power supply (DC) | +15 V DC (±5%) : 150 mA -15 V DC (±5%) : 150 mA |
+15 V DC (±5%) : 150 mA -15 V DC (±5%) : 250 mA |
24 V DC (±10%) : 450 mA | ||
Joint*6 | 1/4 F900 (standard), 1/4 UJR, Rc 1/4 | 1/2 SW (standard), 3/4 SW | |||
Mounting posture | Horizontal installation recommended. | ||||
Weight*7 | Approx. 850 g | Approx. 1000 g | Approx. 2250 g | Approx. 3500 g |