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| Model | Mass Flow Controller | Mass Flow Meter | ||
| EX-250SC | EX-250SM | |||
| Sensor type | Thermal sensor | |||
| Valve type | Normally closed proportional solenoid valve | - | ||
| Applicable gases（*1） | N2、Air、H2、He、Ar、O2、CO2 etc. | |||
| (Gases not specifically mentioned here are subject to calibration for N2 equivalent.) | ||||
| Flow range（*2） | 10SCCM ～ 5SLM | |||
| Control（measure）range | 2 ～ 100%(F.S.) | |||
| Response | ≤ 1sec （within ± 2%F.S.）（*8） | |||
| Accuracy（*3） | ± 1.0%F.S. | |||
| Repeatability | ± 0.2%F.S. | |||
| Operating differential pressure（*4） | 50 ～ 300kPa（Ar、CO2：１00kPa ～ 300kPa） | - | ||
| Inlet maximum pressure | 500kPa（G） | |||
| Proof pressure | 980kPa（G） | |||
| External leak rate（He） | ≤ 1.0 × 10-8Pa・m3/sec | |||
| Temperature | Working temp. | 5 ～ 50℃ | ||
| Accuracy guaranteed temp. | 15 ～ 35℃ | |||
| Allowable storage temp. | -10 ～ 60℃ | |||
| Allowable operating humidity | 10 ～ 90%RH (without dew condensation) | |||
| Materials of gas contact part | SUS316, SUS316L, magnetic stainless steel（*5）, PTFE, FKM | |||
| Electrical connection | Dsub 9pin KFC Standard（SEMI standard compliant） | |||
| HR-10A | ||||
| Flow rate setting signal | 0～5VDC(input impedance: approx. 1M Ω) | - | ||
| or 4～20mA(input impedance: approx. 250 Ω) | ||||
| Flow rate output signal | 0 ～ 5VDC( load resistance ≧10k Ω) | |||
| or 4 ～ 20mA( load resistance ≧500 Ω) | ||||
| Digital communication | RS485 rotary-switch address setting | |||
| Required power supply (DC) | +15VDC( ± 5%)100mA , -15VDC（± 5%）150mA | |||
| or +24VDC（± 10%） ≤180mA (MFM would be ≤100mA) | ||||
| Joint（*6） | 1/4F900（standard） | |||
| Mounting posture | Horizontal installation recommended. | |||
| Weight（*7） | Approx.500g | Approx.440g | ||
